EXPERIENCE OF HANDLING FABRICATION / CHARACTERIZATION / SIMULATION TOOLS
@ CEN (IITBNF), INDIAN INSTITUTE OF TECHNOLOGY BOMBAY, MUMBAI, INDIA
- Four Target Electron Beam Evaporator
- Thermal Vacuum Evaporator
- Hot–Wire Chemical Vapor Deposition System (HWCVD)
- Low–Pressure Chemical Vapor Deposition System (LPCVD)
- Atmospheric–Pressure Chemical Vapor Deposition System (APCVD)
- Oxidation Furnaces
- Annealing Furnaces
- Diffusion Furnaces
- Inductively Coupled Plasma Assisted Reactive Ion Etching (ICPRIE)
- Rapid Thermal Annealing (RTA)
- Inductively Coupled Plasma Chemical Vapor Deposition (ICPCVD)
- Double Sided Aligner (Optical Lithography)
- Scanning Electron Microscopy (SEM)
- Electron Beam Lithography (EBL)
- High Resolution Transmission Electron Microscopy HR-TEM)
- X-ray Diffraction (XRD)
- Energy-Dispersive X-ray Spectroscopy (EDX)
- X-ray Fluorescence (XRF)
- Surface Profilometer
- Laser Writer (Mask Designing Tool)
- Atomic Force Microscopy (AFM)
- Probe Station Measurement Set-Up for I–V, C-V, Reliability Studies
- Temperature Dependent Magneto-Electric Experimental Setup (10K to 350K)
- Magneto-Optical Kerr Effect setup
- Superconducting-Quantum Interference- Device (SQUID) Magnetometry
- Photoluminescence Measurement set up (PL Set up)
- Wire Bonder
- Potentiostat
- μ-SOFC Testing Setup
- PEMFC Testing Setup
- Matlab
- Material Studio
- COMSOL Multiphysics
- Sentaurus TCAD