Nanoelectronic Fab. Exp.

EXPERIENCE OF HANDLING FABRICATION / CHARACTERIZATION / SIMULATION TOOLS

@ CEN (IITBNF), INDIAN INSTITUTE OF TECHNOLOGY BOMBAY, MUMBAI, INDIA

 

  1. Four Target Electron Beam Evaporator
  2. Thermal Vacuum Evaporator
  3. Hot–Wire Chemical Vapor Deposition System (HWCVD)
  4. Low–Pressure Chemical Vapor Deposition System (LPCVD)
  5. Atmospheric–Pressure Chemical Vapor Deposition System (APCVD)
  6. Oxidation Furnaces
  7. Annealing Furnaces
  8. Diffusion Furnaces
  9. Inductively Coupled Plasma Assisted Reactive Ion Etching (ICPRIE)
  10. Rapid Thermal Annealing (RTA)
  11. Inductively Coupled Plasma Chemical Vapor Deposition (ICPCVD)
  12. Double Sided Aligner (Optical Lithography)
  13. Scanning Electron Microscopy (SEM)
  14. Electron Beam Lithography (EBL)
  15. High Resolution Transmission Electron Microscopy HR-TEM)
  16. X-ray Diffraction (XRD)
  17. Energy-Dispersive X-ray Spectroscopy (EDX)
  18. X-ray Fluorescence (XRF)
  19. Surface Profilometer
  20. Laser Writer (Mask Designing Tool)
  21. Atomic Force Microscopy (AFM)
  22. Probe Station Measurement Set-Up for I–V, C-V, Reliability Studies
  23. Temperature Dependent Magneto-Electric Experimental Setup (10K to 350K)
  24. Magneto-Optical Kerr Effect setup
  25. Superconducting-Quantum Interference- Device (SQUID) Magnetometry
  26. Photoluminescence Measurement set up (PL Set up)
  27. Wire Bonder
  28. Potentiostat
  29. μ-SOFC Testing Setup
  30. PEMFC Testing Setup
  31. Matlab
  32. Material Studio
  33. COMSOL Multiphysics
  34. Sentaurus TCAD